● 排气路径短,减少反应物沉积

干式螺旋真空泵相较于其他形式的真空泵,因气 体于泵浦内的传输路径最短,最不易产生反应物沉 积的现象。

● 线形密封性佳,泵浦性能最优

专利转子密封线形,转子密封性佳,转子能以较 大的啮合间隙达到更快的抽气效果。由于啮合间隙 较大,泵浦较不易因制程气体沉积而卡死,转子也 较不易因磨耗而需更换。

● 结构简单,故障率低,维修容易

螺旋式真空泵因只需利用一对转子互相啮合达到 密封效果,结构上不像其他形式的真空泵需要有中 间隔板的设计,降低转子与隔板沉积卡死的风险。 且因其结构单纯,拆解维修也较容易,因此能缩短 维修时程,降低维修费用。

● 微电脑操作,远端监控,保护周全

微电脑操控器提供真空泵浦最简易的操作方式并 能显示泵浦完整的运转状态,方便使用者对泵浦应 用状况进行调整,在泵浦产生问题前进行预防保养 。远端监控系统能提供使用者方便的监控工具,使 用者不需到现场即能查询泵浦之运转状况。

● Short Gas Path and Reduce the Contamination of Process Gas

Comparing with other types of dry vacuum pump,HANBELL screw vacuum pump has the shortest gas path in the vacuum pump and that could reduce the contamination of process gas. Screw rotors can play as a powder transmission mechanism,we runs well even there has lots of contamination inside the pump.

军规电源接头

通讯接口

● Exellent Pump Performance Due to the Excellent Profile Sealing Effects

Rotor

Patented rotor profile can provide rotor excellent sealing effects thus a larger clearance is allowable in between.Pump rotor wearing and rotor jam by the process contamination can be reduced by larger allowable clearance.

● Simple Structure Reduce the Chance of Unexpected Pump Stop and Easy for Overhaul Process.

Screw type vacuum is composed by a pair of screw rotors and isolation plates are required in different stages of Pumping chamber,Process contamination between rotors and isolation plates can also be avoided.Overhaul Hanbell dry pump is much easier than other type of dry pump,so the repair time is shorter and the cost is saver.

● Microprocessor Controller and Remote Control Software Can Protece Pump from Abnormal Situations.